Krypton Neon Specialty Gas Mixtures 248nm Lithography Process - N/A
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Krypton Neon Specialty Gas Mixtures 248nm Lithography Process
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Description:
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Specialty Gas Mixtures
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Krypton Neon Mixtures are used in 248 nm lithography applications, usually in conjunction with a halogen gas mixture.
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Krypton, like the other noble gases, is used in lighting and photography. Krypton light has many spectral lines, and krypton plasma is useful in bright, high-powered gas lasers (krypton ion and excimer lasers), each of which resonates and amplifies a single spectral line. Krypton fluoride also makes a useful laser.
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Specifications:
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1. Physical properties
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Major Components |
COMPONENTS | CONCENTRATION | RANGE |
Krypton | 1.25% | 1.2-1.3% |
Neon | Balance | ? |
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2. Typical technical data (COA)
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Maximum Impurities |
COMPONENTS | CONCENTRATION (ppm) |
Carbon Dioxide (CO2) | <0.5 |
Carbon Monoxide (CO) | <0.5 |
Carbon Tetrafluoride (CF4) | <0.5 |
Helium (He) | <8.0 |
Moisture (H2O) | <0.5 |
Nitrogen (N2) | <1.0 |
Oxygen (O2) | <0.5 |
THC (as Methane) (CH4) | <0.5 |
Xe | <1.0 |
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Cylinder Specifications | Contents | Pressure |
Cylinder | Valve Outlet Options | Cubic Feet | Liters | PSIG | BAR |
1 | CGA580 | DIS718 | 265 | 7500 | 2000 | 139 |
2 | CGA580 | DIS718 | 212 | 6000 | 2000 | 139 |
3 | CGA580 | DIS718 | 71 | 2000 | 1800 | 125 |
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Applications:
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? 1. | Krypton is used in some photographic flashes for high speed photography. Krypton gas is also combined with other gases to make luminous signs that glow with a bright greenish-yellow light. ? |
2. | ? As The krypton fluoride laser. ? |
3. | ? Use In experimental particle physics ? |
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Wuhan Newradar Special Gas Co.,Ltd
Address: Room 803, Chuangye Bulding #1, Jiangda Road, Jiangan District, Wuhan, Hubei, China, 430012, Wuhan, Hubei, China, 430000
Tel: 86-27-82653381
Wuhan Newradar Special Gas聽Company Limited is located in Wuhan and is specialized in manufacturing electronic gas, high purity gas and kinds of specialty gas and types of steel cylinders, valves and pressure regulators. For high purity gas, we are long-term supplier of hydrogen chloride gas, he
